Our semiconductor grade gases are used in applications ranging from propylene used in ashable hard mask, methane and carbon monoxide for etch modulation and ethylene used for carbon replenishment in the dielectric layer. We understand the demanding quality requirements of the industry and support our customers with improved tolerances, ship to control and SPC/SQC data.
Our standard products are shown below and in all cases if the specification required is not shown we are able to provide customised specifications.
|Product||Chemical Formula||Purity Range Available|
|Carbon Monoxide||CO||99.99% to 99.999%|
|Ethane||C2H6||99.995% to 99.9995%|
|Ethylene||C2H4||99.999% to 99.9995%|
|Methane||CH4||99.999% to 99.9999%|
|Propylene||C3H6||99.95% to 99.995%|